主要特性与技术指标___General FeaturesOption for 4070 Series of parametric testersMulti-channel SMU measurement capabilityOne pass platform on 4070 SeriesConcurrent TEG test/measurementMeasurement CapabilitiesUp to 40 SMU channels5 picoamp and 100 microvolt measurement resolutionAddress signal generationSMU embedded program memory for concurrent measurementApplication for BEOL/Yield Ramp UGood for BEOL TEG testing (Resistor,Vth,etc.)Concurrent measurement resource for High/Low resolution TEG partImprove existing 4070′s throughput drastically for BEOL TEG testingAddressable Array Test StructureAddress Generation Function on Parametric TesterSPC (Statistical Process Control) for DFMUp to 32 bit parallel address signal generationUp to 8 V/125 mA/50 kbps address signal generation
东莞市亚威电子仪器有限公司
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